Siloxane resin coating
AssigneeDow Corning Corporation
InventorBianxiao Zhong
Life of this patent
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Abstract
A siloxane resin having the formula: (HSiO3/2)a(RSiO3/2)b(SiO4/2)c where R is Z, Z(CH2)n or ZO(CH2)n where Z is a phenyl or substituted phenyl group; n has a value of 1 to 6, a has value of 0.01 to 0.7, b has a value of 0.05 to 0.7, c has a value of 0.1 to 0.9 and a+b+c≈1. The siloxane resins are useful in anti-reflective coating compositions.
Claims33
A siloxane resin having the formula (HSiO3/2)a(RSiO3/2)b(SiO4/2)c where R is Z, Z(CH2)n or ZO(CH2)n where Z is a phenyl or substituted phenyl group;
- n has a value of 1 to 6, a has value of 0.01 to 0.7, b has a value of 0.05 to 0.7, c has a value of 0.1 to 0.9 and a+b+c≈1.
A method of making a siloxane resin wherein the method comprises forming a reaction mixture comprising water, HSiX3, RSiX3 and SiX4 and organic solvent, where X is a hydrolyzable group, R is Z, Z(CH2)n or ZO(CH2)n Z is a phenyl or substituted phenyl group, and n has a value of 1 to 6;
- said method comprising reacting the reaction mixture to produce the siloxane resin.
An anti-reflective coating composition comprising (A) a siloxane resin having the formula (HSiO3/2)a(RSiO3/2)b(SiO4/2)c where R is Z, Z(CH2)n or ZO(CH2)n where Z is a phenyl or substituted phenyl group;
- n has a value of 1 to 6, a has value of 0.01 to 0.7, b has a value of 0.05 to 0.7, c has a value of 0.1 to 0.9 and a+b+c≈1;
- and (B) a solvent.
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A method for preparing an anti-reflective coating on a substrate, said method comprising
- (I) applying an anti-reflective coating composition onto a substrate to form a coated substrate, wherein the anti-reflective coating composition comprises
- (A) a siloxane resin having the formula siloxane resin having the formula (HSiO3/2)a(RSiO3/2)b(SiO4/2)c where R is Z, Z(CH2)n or ZO(CH2)n where Z is a phenyl or substituted phenyl group;
- n has a value of 1 to 6, a has value of 0.01 to 0.7, b has a value of 0.05 to 0.7, c has a value of 0.1 to 0.9 and a+b+c≈1, and
- (B) a solvent;
- and
- (II) curing the coated substrate, to form the anti-reflective coating on the substrate.
The method as claimed in claim 33 wherein the cure catalyst is selected from sulfuric acid (H2SO4), (4-Methylthiophenyl)methyl phenyl sulfonium triflate and 2-Naphthyl diphenylsulfonium triflate.
Dependencies are inferred from the claim text.