Vertically-aligned nanopillar array on flexible, biaxially-textured substrates for nanoelectronics and energy conversion applications

Abstract

An article having a biaxially textured substrate surface and a plurality of vertically-aligned, epitaxial nanopillars supported on the surface substrate is disclosed. The article can include a matrix phase deposited on the biaxially textured surface and between the plurality of vertically-aligned, epitaxial nanopillars. The nanopillars can include a coating. The matrix phase and the vertically-aligned, epitaxial nanopillars can form an electronically active layer selected from the group consisting of a superconducting material, a ferroelectric material, a multiferroic material, a magnetic material, a photovoltaic material, a electrical storage material, and a semiconductor material. A method of making the article is also disclosed.

Dependencies are inferred from the claim text.