Method for forming porous material in microcavity or micropassage by mechanicochemical polishing
AssigneesCommissariat A L'energie Atomique Et Aux Energies Alternatives, STMicroelectronics (Crolles 2) SAS
InventorsJean-Christophe Coiffic, Maurice Rivoire
Life of this patent
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Abstract
A surface of a substrate comprising microcavities leading out of the substrate is placed in contact with an aqueous solution comprising a plurality of suspended particles and a fabric. Perpendicular pressure is applied the expanse of the substrate between the fabric and the surface of the substrate, and relative movement of the fabric and the surface is applied to the expanse of the substrate. At least one particle is thus fed into each microcavity, therein forming a porous material that is a catalyst material for nanothread or nanotube growth.
Claims14
1-11. (canceled)
Method for forming a porous catalyst material in a microcavity or a micropassage of a support, said microcavity or said micropassage opening out onto a surface of the support, comprising the following steps:
- providing the support wherein the surface is in contact with an aqueous solution comprising a plurality of particles of catalyst material in suspension,
- applying a pressure on the support, between a polishing pad and the surface of the support, and a relative movement of the pad and of said surface to insert one particle in the microcavity or the micropassage to form the porous catalyst material.
Dependencies are inferred from the claim text.