Optical glass
AssigneeKabushiki Kaisha Ohara
InventorMichiko Ogino
Life of this patent
Estimating the term…
Abstract
An optical glass has a refractive index (nd) of 1.60 or over and excellent transmittance and internal quality. The optical glass comprises 0.1-4 mass % of Ta2O5 to total mass of glass calculated on oxide basis, has ratio of 0.95<Ta2O5/(Ta2O5+(ZrO2)+TiO2+Nb2O5+WO3)×5)≦1.00, and further comprises SiO2+B2O3+Al2O3+BaO in a total amount of 81% or over.
Claims20
An optical glass for a light guide, an image guide or a glass lens for an exposure device for semiconductors comprising
- each of SiO2, B2O3, BaO, and Ta2O5,
- La2O3 in an amount of 0-2 mass % and
- Nb2O5 in an amount of 0-0.01 mass %,
- wherein the optical glass is free of a lead compound, an arsenic compound, BaCl2, Nd2O3, Sm2O3, As2O3, CeO2, Fe2O3, and Pr2O3,
- the optical glass having the ratio of Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5) being 0.95<Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5)≦1.00) and
- having internal transmittance of 0.9900 or over at a wavelength within a range from 400 nm to 450 nm and internal transmittance of 0.9980 or over at a wavelength within a range from 600 nm to 700 nm as measured respectively in accordance with the Japan Optical Glass Industry Standard JOGIS17-1982 “Measuring Method of Internal Transmittance of Optical Glass” by using two samples having thicknesses of 10 mm and 40 mm, and having a refractive index of 1.55 or over.
An optical glass for a light guide, an image guide or a glass lens for an exposure device for semiconductors, comprising, in mass of glass calculated on oxide basis:
- Ta2O5 0.1-4 mass %, and
- at least one of SiO2, B2O3, Al2O3, and BaO in a total amount of 81% or over, and
- wherein ratio of Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5) is 0.95<Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5)≦1.00, and
- the optical glass is free of BaCl2, Nd2O3, Sm2O3, As2O3, CeO2, Fe2O3, and Pr2O3.
An optical glass for a light guide, an image guide or a glass lens for an exposure device for semiconductors, comprising, in mass of glass calculated on oxide basis:
- BaO
- more than 40 to 50 mass %,
- Ta2O5
- 0.1-4 mass %,
- at least one of SiO2, B2O3, Al2O3, and BaO in a total amount of 81% or over, and
- wherein ratio of Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5) is 0.95<Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5)≦1.00, and
- the optical glass is free of BaCl2, Nd2O3, Sm2O3, As2O3, CeO2, Fe2O3, and Pr2O3.
An optical glass for a light guide, an image guide or a glass lens for an exposure device for semiconductors having a refractive index (nd) of 1.60 or over, comprising, in mass % to total mass of glass calculated on oxide basis:
- SiO2
- 25-36%,
- B2O3
- 5-20%,
- BaO
- greater than 40% and
- not more than 50%,
- Ta2O5
- 0.1-4%, and
- wherein ratio of Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5) is 0.95<Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5)≦1.00,
- wherein a total amount of (SiO2+B2O3+Al2O3+BaO) is 81% or over, and
- the glass is free of BaCl2, Nd2O3, Sm2O3, As2O3, CeO2, Fe2O3, and Pr2O3.
An optical glass for a light guide, an image guide or a glass lens for an exposure device for semiconductors having a refractive index (nd) of 1.60 or over, comprising, in mass % to total mass of glass calculated on oxide basis:
- SiO2
- 25-36%
- B2O3
- 5-20%
- BaO
- greater than 40% and
- not more than 50%,
- Ta2O5
- 0.1-4%,
- Al2O3
- 0-10%,
- ZrO2
- 0-less than 0.01%,
- TiO2
- 0-0.01%,
- Nb2O5
- 0-0.01%,
- WO3
- 0-0.01%,
- Sb2O3
- 0-0.4%,
- ZnO
- 0-10%,
- MgO
- 0-10%,
- CaO
- 0-10%,
- SrO
- 0-10%,
- Li2O
- 0-5%,
- Na2O
- 0-5%,
- K2O
- 0-5%, and
- a fluoride or fluorides of a metal element or elements contained in the above metal oxides, a total amount of F contained in the fluoride or fluorides within a range from 0 to 0.5 mass part to 100 mass parts of the glass calculated on oxide basis,
- wherein ratio of Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5) is 0.95<Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5)≦1.00, and a total amount of (SiO2+B2O3+Al2O3+BaO) is 81% or over, and
- the optical glass is free of BaCl2, Nd2O3, Sm2O3, As2O3, CeO2, Fe2O3, and Pr2O3,
An optical glass for a light guide, an image guide or a glass lens for an exposure device for semiconductors having a refractive index (nd) of 1.60 or over, comprising, in mass % to total mass of glass calculated on oxide basis:
- SiO2
- 25-35%,
- B2O3
- 5-14.8%,
- BaO
- 41-49.8%,
- Ta2O5
- 0.25-3%,
- ZnO
- 1-7%,
- CaO
- 1-5%,
- Sb2O3
- 0.001-0.1%,
- Al2O3
- 0-5%,
- ZrO2
- 0-less than 0.01%,
- TiO2
- 0-0.01%,
- Nb2O5
- 0-0.01%,
- WO3
- 0-0.01%,
- MgO
- 0-6%,
- SrO
- 0-6%,
- Li2O
- 0-2%,
- Na2O
- 0-2%,
- K2O
- 0-3%,
- SnO
- 0-0.2, and
- a fluoride or fluorides of a metal element or elements contained in the above metal oxides, a total amount of F contained in the fluoride or fluorides within a range from 0 to 0.5 mass part to 100 mass parts of the glass calculated on oxide basis,
- wherein ratio of Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5) is 0.95<Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5)≦1.00,
- a total amount of (SiO2+B2O3+Al2O3+BaO) is 81% or over, and
- the glass is free of BaCl2, Nd2O3, Sm2O3, As2O3, CeO2, Fe2O3, and Pr2O3.
An optical glass for a light guide, an image guide or a glass lens for an exposure device for semiconductors having a refractive index (nd) of 1.60 or over, comprising, in mol % calculated on oxide basis:
- SiO2
- 40-55%,
- B2O3
- 8-20%,
- BaO
- 20-35%,
- Ta2O5
- 0.01-2%,
- Al2O3
- 0-10%,
- ZrO2
- 0-less than 0.02%,
- TiO2
- 0-0.02%,
- Nb2O5
- 0-0.01,
- WO3
- 0-0.02,
- Sb2O3
- 0-0.2%,
- ZnO
- 0-10%,
- MgO
- 0-15%,
- CaO
- 0-15%,
- SrO
- 0-15%,
- Li2O
- 0-8%,
- Na2O
- 0-5%,
- K2O
- 0-5%,
- SnO
- 0-1%, and
- a fluoride or fluorides of a metal element or elements contained in the above metal oxides, ratio of mass amount of F contained in the fluoride or fluorides to total mass amount of the glass calculated on oxide basis being within a range from 0 to 0.015,
- wherein ratio of Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5) is 0.95<Ta2O5/(Ta2O5+(ZrO2+TiO2+Nb2O5+WO3)×5)≦1.00, and
- the glass is free of BaCl2, Nd2O3, Sm2O3, As2O3, CeO2, Fe2O3, and Pr2O3.
Dependencies are inferred from the claim text.