Polishing apparatus, polishing auxiliary apparatus and polishing method

Abstract

A polishing apparatus, a polishing method and a polishing auxiliary apparatus which are able to suppress clogging of the rotating grindstone and polish the work while suppressing the damage thereof are provided. A polishing apparatus 1 according to the present invention includes: a rotating shaft section 5; a rotating table 6 which is arranged on the rotating shaft section 5 and holds a work 30 on an upper surface of the rotating table; a rotating grindstone 3 which is supported to be able to rotate in a direction opposite to the rotating direction of the rotating table 6 and to move up and down; a dress grindstone arranging section 10 arranged around the rotating shaft section 5; and a dress grindstone 11 which is fixed onto the dress grindstone arranging section 10 with a polishing surface thereof facing a polishing surface of the rotating grindstone 3, wherein the work is polished by bringing a surface of the rotating grindstone 3 into contact with a surface of the work 30 while rotating the rotating table 6 and the rotating grindstone 3 in directions opposite to each other, and the rotating grindstone 3 is dressed by bringing a polishing surface of the rotating grindstone 3 into contact with the polishing surface of the dress grindstone 11.

Dependencies are inferred from the claim text.