Methods and related systems for thin film laser scribing devices
AssigneeApplied Materials, Inc.
InventorsAntoine P. Manens, Wei-Sheng Lei
Life of this patent
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Abstract
Methods and related systems for fabricating a solar-cell assembly are provided. An example method comprises forming a series of layers and scribing a series of aligned interconnect lines in the layers prior to forming any isolation line related features. The example method provides for the use of contiguously-scribed interconnect lines as compared to an existing method where at least one interconnect line is segmented to avoid scribing through a previously-formed isolation line related feature located where an isolation line is to be scribed. The ability to use contiguously-scribed interconnect lines may improve the throughput of the fabrication process.
Claims24
A method for fabricating a solar-cell assembly, the method comprising:
- providing a workpiece comprising a substrate and a first layer;
- scribing a plurality of first interconnect lines into the first layer;
- depositing a second layer onto the first layer and into the first interconnect lines;
- scribing a plurality of second interconnect lines into the second layer, wherein each of the second interconnect lines is located adjacent to one of the first interconnect lines, and wherein each second interconnect line is contiguous;
- depositing a third layer onto the second layer and into the second interconnect lines;
- scribing a plurality of third interconnect lines into the second layer and the third layer, wherein each of the third interconnect lines is located adjacent to one of the second interconnect lines;
- and
- scribing a plurality of isolation lines into the first, second, and third layers.
A system for fabricating a solar-cell assembly, the system comprising:
- a support mechanism for receiving a workpiece comprising a substrate and a first layer;
- at least one laser device each configured to direct a laser beam toward the workpiece;
- and
- a laser controller operable to cause the at least one laser device to:
- scribe a plurality of first interconnect lines into the first layer,
- after a second layer is deposited onto the first layer and into the first interconnect lines, scribe a plurality of second interconnect lines into the second layer, wherein each of the second interconnect lines is located adjacent to one of the first interconnect lines, and wherein each second interconnect line is contiguous,
- after a third layer is deposited onto the second layer and into the second interconnect lines, scribe a plurality of third interconnect lines into the second layer and the third layer, wherein each of the third interconnect lines is located adjacent to one of the second interconnect lines, and
- scribe a plurality of isolation lines into the first, second, and third layers.
A method for fabricating a solar-cell assembly, the method comprising:
- providing a workpiece comprising a substrate and a first layer;
- scribing a plurality of first interconnect lines into the first layer;
- after a second layer is deposited onto the first layer and into the first interconnect lines, scribing a plurality of second interconnect lines into the second layer, wherein each of the second interconnect lines is located adjacent to one of the first interconnect lines, and wherein each second interconnect line is contiguous;
- after a third layer is deposited onto the second layer and into the second interconnect lines, scribing a plurality of third interconnect lines into the second layer and the third layer, wherein each of the third interconnect lines is located adjacent to one of the second interconnect lines;
- and
- scribing a plurality of isolation lines into the first, second, and third layers.
A system for fabricating a solar-cell assembly, the system comprising:
- a translation stage operable to support the workpiece and translate the supported workpiece in a longitudinal direction;
- an encoder operatively coupled with the translation stage so as to measure a position of the translation stage;
- a laser operable to generate output able to remove material from at least a portion of the workpiece;
- a laser switch coupled with the laser so as to control the timing of the laser output by triggering the laser output;
- and
- a controller operatively coupled with the translation stage, the encoder, and the laser switch,
- wherein the controller is operable to trigger the laser switch in response to an encoder measured position of the translation stage to interrupt the formation of a laser-scribed line so as to skip over a previously-formed laser scribed line.
A system for fabricating a solar-cell assembly, the system comprising:
- a support mechanism for receiving a workpiece;
- a laser operable to generate output able to remove material from at least a portion of the workpiece;
- a laser switch coupled with the laser so as to control the timing of the laser output by triggering the laser output;
- a scanning device operable to control a position of the output from the laser;
- an encoder operatively coupled with the scanning device so as to measure a position of the scanning device;
- and
- a controller operatively coupled with the scanning device, the encoder, and the laser switch,
- wherein the controller is operable to trigger the laser switch in response to an encoder measured position of the scanning device to interrupt the formation of a laser-scribed line so as to skip over a previously-formed laser scribed line.
Dependencies are inferred from the claim text.