Flexible display and manufacturing method of the same

An active matrix flexible display in which a TFT is provided for each pixel, comprising:

• a TFT substrate including a first plastic film, an adhesive layer formed on the first plastic film, a protective layer formed on the adhesive layer, a gate electrode for the TFT, which is buried in the protective layer, a gate insulating layer for the TFT, which covers the gate electrode, source and drain electrodes for the TFT, which are formed on the gate insulating layer and disposed at predetermined intervals on the gate electrode, a pixel electrode which is formed on the gate insulating layer and is electrically connected to the drain electrode, an organic active layer for the TFT, which is formed on a space between the source and drain electrodes and is electrically connected to the source and drain electrodes, and a first alignment film formed above the pixel electrode and the organic active layer;
• a counter substrate including a second plastic film, a common electrode formed on the second plastic film, and a second alignment film formed on the common electrode;
• and
• liquid crystal sealed between the TFT substrate and the counter substrate.

A method of manufacturing an active matrix flexible display in which a TFT is provided for each pixel, comprising the steps of:

• forming a peelable layer on a temporary substrate;
• forming source and drain electrodes for the TFT on the peelable layer, and forming a pixel electrode electrically connected to the drain electrode;
• forming a gate insulating layer for the TFT, which covers the source electrode, the drain electrode and the pixel electrode;
• forming a gate electrode for the TFT in a portion on the gate insulating layer on a space between the source and drain electrodes;
• forming a protective layer which covers the gate electrode;
• attaching a plastic film to the protective layer with an adhesive layer interposed therebetween;
• peeling the temporary substrate from an interface with the peelable layer, and transferring the peelable layer, the source electrode, the drain electrode, the pixel electrode, the gate insulating layer, the gate electrode and the protective layer onto the plastic film;
• exposing upper surfaces of the source electrode, the drain electrode and the pixel electrode by removing the peelable layer;
• forming an organic active layer for the TFT, which is electrically connected to the source and drain electrodes, on the space between the source and drain electrodes;
• forming an organic EL layer, which includes an emitting layer, on the pixel electrode of each pixel before or after the organic active layer is formed;
• forming a metal electrode on the organic EL layer;
• and
• forming a sealing layer which covers the metal electrode.

A method of manufacturing an active matrix flexible display in which a TFT is provided for each pixel, comprising the steps of:

• (a) preparing a TFT substrate by use of a manufacturing method comprising the steps of:
• forming a peelable layer on a temporary substrate;
• forming source and drain electrodes for the TFT on the peelable layer and forming a pixel electrode electrically connected to the drain electrode;
• forming a gate insulating layer for the TFT, which covers the source electrode, the drain electrode and the pixel electrode;
• forming a gate electrode for the TFT in a portion on the gate insulating layer on a space between the source and drain electrodes;
• forming a protective layer which covers the gate electrode;
• attaching a first plastic film to the protective layer with an adhesive layer interposed therebetween;
• peeling the temporary substrate from an interface with the peelable layer, and transferring the peelable layer, the source electrode, the drain electrode, the pixel electrode, the gate insulating layer, the gate electrode and the protective layer onto the first plastic film;
• exposing upper surfaces of the source electrode, the drain electrode and the pixel electrode by removing the peelable layer;
• forming an organic active layer for the TFT, which is electrically connected to the source and drain electrodes, on the space between the source and drain electrodes;
• and
• forming an alignment film above the pixel electrode and the organic active layer;
• (b) attaching the TFT substrate to a counter substrate with a predetermined space therebetween, the counter substrate having a structure in which a common electrode and an alignment film are formed on a second plastic film;
• and
• (c) sealing liquid crystal between the TFT substrate and the counter substrate.

An active matrix flexible display in which a TFT is provided for each pixel, comprising:

• a plastic film;
• an adhesive layer formed on the plastic film;
• a barrier insulating layer formed on the adhesive layer;
• a TFT which is formed on or above the barrier insulating layer and has a structure in which an organic active layer, a gate insulating layer and a gate electrode are formed sequentially .from the bottom, and source and drain electrodes are electrically connected to the organic active layer;
• a pixel electrode which is formed above the barrier insulating layer and is electrically connected to the drain electrode of the TFT;
• an organic EL layer including an emitting layer formed on the pixel electrode of each pixel;
• a metal electrode formed on the organic EL layer;
• and
• a sealing layer which covers the metal electrode.

An active matrix flexible display in which a TFT is provided for each pixel, comprising:

• a TFT substrate including a first plastic film, an adhesive layer formed on the first plastic film, a barrier insulating layer formed on the adhesive layer, a TFT which is formed on or above the barrier insulating layer and has a structure in which an organic active layer, a gate insulating layer and a gate electrode are formed sequentially from the bottom and source and drain electrodes are electrically connected to the organic active layer, a pixel electrode which is formed above the barrier insulating layer and is electrically connected to the drain electrode of the TFT, and a first alignment film formed on the TFT and the pixel electrode;
• a counter substrate including a second plastic film, a common electrode formed on the second plastic film, and a second alignment film formed on the common electrode;
• and
• liquid crystal sealed between the TFT substrate and the counter substrate.

A method of manufacturing an active matrix flexible display in which a TFT is provided for each pixel, comprising the steps of:

• forming a peelable layer on a temporary substrate;
• forming a TFT on the peelable layer, the TFT having a structure in which a gate electrode, a gate insulating layer and an organic active layer are formed sequentially from the bottom and source and drain electrodes are electrically connected to the organic active layer, and forming a pixel electrode electrically connected to the drain electrode of the TFT;
• forming a barrier insulating layer on or above the TFT;
• attaching a plastic film to a barrier insulating layer with an adhesive layer interposed therebetween;
• transferring and forming the barrier insulating layer, the TFT, the pixel electrode and the peelable layer in a state of being inverted upside down on the plastic film with the adhesive layer interposed therebetween by peeling the temporary substrate from an interface with the peelable layer;
• removing the peelable layer to partially expose the TFT and the pixel electrode;
• forming an organic EL layer, which includes an emitting layer, on the pixel electrode of each pixel;
• forming a metal electrode on the organic EL layer;
• and
• forming a sealing layer which covers the metal electrode.

A method of manufacturing an active matrix flexible display in which a TFT is provided for each pixel, comprising the steps of:

• (a) preparing a TFT substrate by use of a manufacturing method comprising the steps of:
• forming a peelable layer on a temporary substrate;
• forming a TFT on the peelable layer, the TFT having a structure in which a gate electrode, a gate insulating layer and an organic active layer are formed sequentially from the bottom, and source and drain electrodes are electrically connected to the organic active layer, and forming a pixel electrode electrically connected to the drain electrode of the TFT;
• forming a barrier insulating layer on or above the TFT;
• attaching a plastic film to the barrier insulating layer with an adhesive layer interposed therebetween;
• transferring and forming the barrier insulating layer, the TFT, the pixel electrode and the peelable layer in a state of being inverted upside down on the plastic film with the adhesive layer interposed therebetween by peeling the temporary substrate from an interface with the peelable layer;
• removing the peelable layer to partially expose the TFT and the pixel electrode;
• and
• forming an alignment film on the TFT and the pixel electrode;
• (b) attaching the TFT substrate to a counter substrate with a predetermined space therebetween, the counter substrate having a structure in which a common electrode and an alignment film are formed on a second plastic film;
• and
• (c) sealing liquid crystal between the TFT substrate and the counter substrate.