US 2011/0033952 A1 · Sensor for Biomolecules

Abstract

A sensor for biomolecules includes a silicon fin comprising undoped silicon; a source region adjacent to the silicon fin, the source region comprising heavily doped silicon; a drain region adjacent to the silicon fin, the drain region comprising heavily doped silicon of a doping type that is the same doping type as that of the source region; and a layer of a gate dielectric covering an exterior portion of the silicon fin between the source region and the drain region, the gate dielectric comprising a plurality of antibodies, the plurality of antibodies configured to bind with the biomolecules, such that a drain current flowing between the source region and the drain region varies when the biomolecules bind with the antibodies.

Claims21

Dependent claims

A sensor for biomolecules, comprising:

a silicon fin comprising undoped silicon;
a source region adjacent to the silicon fin, the source region comprising heavily doped silicon;
a drain region adjacent to the silicon fin, the drain region comprising heavily doped silicon of a doping type that is the same doping type as that of the source region;
and
a layer of a gate dielectric covering an exterior portion of the silicon fin between the source region and the drain region, the gate dielectric comprising a plurality of antibodies, the plurality of antibodies configured to bind with the biomolecules, such that a drain current flowing between the source region and the drain region varies when the biomolecules bind with the antibodies.

2 more elements

Dependencies are inferred from the claim text.

Sensor for Biomolecules

Life of this patent

Sensor for Biomolecules

Life of this patent

Abstract

Claims21