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US 2011/0033800 A1Published application
Coating compositions for use with an overcoated photoresist
AssigneeRohm and Haas Electronic Materials LLC
InventorsAnthony ZAMPINI, Vipul Jain, Cong Liu, Suzanne Coley, Owendi Ongayi
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Abstract
Cyanurate compositions are provided that are particularly useful as a reagent to form a resin component of a coating composition underlying an overcoated photoresist. Preferred isocyanurates compound comprise substitution of multiple cyanurate nitrogen ring atoms by at least two distinct carboxy and/or carboxy ester groups.
Claims12
A cyanurate compound comprising substitution of multiple cyanurate nitrogen ring atoms by distinct carboxy and/or carboxy ester groups.
Dependencies are inferred from the claim text.