Method for manufacturing optical waveguide
AssigneePanasonic Electric Works Co., Ltd.
InventorsTohru Nakashiba, Shinji Hashimoto, Naoyuki Kondou
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Abstract
An object is to manufacture an optical waveguide having low optical loss, by smoothing the surface of a core. To this end, a method for manufacturing an optical waveguide includes: a core-forming layer formation step of forming a core-forming layer of a photosensitive polymer on a surface of a lower cladding layer formed on a substrate; a smoothing step of smoothing the surface by lowering a surface viscosity thereof through a heat treatment of the core-forming layer; and a photocuring step of forming a core through selective exposure of the smoothed core-forming layer.
Claims9
A method for manufacturing an optical waveguide,
- the method comprising:
- a core-forming layer formation step of forming a core-forming layer of a photosensitive polymer on a lower cladding layer formed on a substrate;
- a smoothing step of smoothing the surface of the core-forming layer by lowering the surface viscosity thereof through a heat treatment of the core-forming layer;
- and
- a exposure step of forming a core through selective exposure to the core-forming layer from the surface of the smoothed core-forming layer.
Dependencies are inferred from the claim text.