Modular and readily configurable reactor enclosures and associated function modules

A method for configuring a modular CVD reactor sub-system, the modular CVD reactor sub-system comprising a modular reactor enclosure supporting a CVD reactor chamber and a plurality of independent function modules, the independent function modules being supported by the reactor enclosure adjacent to the exterior walls of the CVD chamber but otherwise structurally independent of the reactor enclosure, each independent function module providing one or more functions to nearby portions of the CVD reactor chamber and its interior that are useful to processes carried out within the CVD chamber, the method comprising:

• selecting one or more independent function modules;
• for each selected function module, selecting a corresponding portion of the CVD chamber and its interior;
• removing any function modules that are supported by the reactor enclosure nearby to the selected portions of the CVD chamber and its interior;
• and
• supporting each selected function module on the reactor enclosure adjacent to exterior walls of the CVD chamber that are nearby to the corresponding portion of the CVD reactor chamber and its interior selected for that function module.

An independent function module for use with a modular CVD reactor sub-system including a modular reactor enclosure that supports a CVD reactor chamber, the module comprising:

• at least one housing that is structurally independent of and removable from the reactor enclosure;
• and
• one or more function elements supported by the function module housing,
• wherein the independent function module and the modular reactor enclosure are mutually configured and sized so that the function module can be supported by the reactor enclosure adjacent to the exterior walls of the reactor chamber at a plurality of different positions, and
• wherein, when supported at a particular position adjacent to the exterior walls of the reactor chamber, the independent function module provides one or more functions to nearby portions of the CVD reactor chamber and its interior that are useful to processes carried out within the CVD chamber.