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US 2011/0033315 A1Published application
Microfluidic pump
AssigneeNXP B.V.
InventorEvelyne Gridelet
Life of this patent
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Abstract
A microfluidic pump comprises a plurality of metal electrodes (10) which oxidise in air, a liquid droplet (14) to be moved by the pump, which is in contact with a least one metal electrode, and means for controlling the oxidation state of the metal electrodes in order to vary the electrode wettability. This arrangement enables full integration with a semiconductor device, and with low drive voltages.
Claims15
A microfluidic pump comprising:
- a plurality of metal electrodes which oxidise in air;
- a liquid droplet to be moved by the pump, which is in contact with a least one metal electrode;
- and
- means for controlling the oxidation state of the metal electrodes in order to vary the electrode wettability.
1 more element
A method of fabricating a microfluidic pump, comprising:
- forming a dielectric layer over a substrate;
- forming a plurality of wells in the dielectric layer;
- at least partially filling each well with a metal electrode which oxidises in air;
- and
- providing a liquid droplet, to be moved by the pump, over the wells and in contact with the metal electrode of at least one well.
2 more elements
A method of controlling a microfluidic pump comprising:
- controlling the oxidation state of a plurality of metal electrodes, at least one of which is in contact with a liquid droplet, thereby to vary the electrode wettability and controlling the movement of the liquid droplet between the metal electrodes.
Dependencies are inferred from the claim text.