Micromechanical component, light-deflecting device, and manufacturing methods for a micromechanical component and a light-deflecting device

A light-deflecting device, comprising:

• a micromechanical component including:
• a mirror element having a reflective surface on a first outer side of the mirror element, wherein a first potential is applied to a first electrode surface on a second outer side of the mirror element facing opposite from the first outer side;
• a counterelectrode situated adjacent to the second outer side of the mirror element wherein a second potential is applied to a second electrode surface of the counterelectrode;
• and
• a voltage control unit coupled to the first electrode surface of the mirror element via a first contact element, and to the second electrode surface of the counterelectrode via a second contact element, wherein the voltage control unit is configured to apply a temporally varying voltage signal between the first electrode surface and the second electrode surface;
• and
• a mirror surface configured to be displaced about at least one rotational axis, wherein the mirror surface is situated in such a way that a light beam reflected on the reflective surface of the micromechanical component strikes the mirror surface.

A manufacturing method for a micromechanical component, comprising:

• forming a mirror element having a reflective surface on a first outer side of the mirror element, a first electrode surface being formed on a second outer side of the mirror element which faces opposite the first outer side;
• placing a counterelectrode adjacent to the second outer side of the mirror element, the counter electrode having a second electrode surface;
• and
• forming a voltage control unit and coupling the voltage control unit to the first electrode surface of the mirror element via a first contact element, and coupling the voltage control unit to the second electrode surface of the counterelectrode via a second contact element, the voltage control unit being configured to apply, during operation of the micromechanical component, a temporally varying voltage signal between the first electrode surface and the second electrode surface.

A manufacturing method for a light-deflecting device, comprising:

• manufacturing a micromechanical component by:
• forming a mirror element having a reflective surface on a first outer side of the mirror element, a first electrode surface being formed on a second outer side of the mirror element which faces opposite the first outer side;
• placing a counterelectrode adjacent to the second outer side of the mirror element, the counter electrode having a second electrode surface;
• and
• forming a voltage control unit and coupling the voltage control unit to the first electrode surface of the mirror element via a first contact element, and coupling the voltage control unit to the second electrode surface of the counterelectrode via a second contact element, the voltage control unit being configured to apply, during operation of the micromechanical component, a temporally varying voltage signal between the first electrode surface and the second electrode surface;
• placing the micromechanical component in a housing of the light-deflecting device;
• and
• placing a mirror surface in the housing of the light-deflecting device in such a way that a light beam reflected on the reflective surface of the micromechanical component strikes the mirror surface, wherein the mirror surface is configured to be displaced about at least one rotational axis.