System and a method for broadband interferometry
AssigneeCamtek Ltd.
InventorsYacov Malinovich, Gilad Golan
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Abstract
A method and a system for determining a depth of a space, the system includes: a scanner for scanning, by a single broadband light beam, the structural element and the area of the surface of the object, wherein the area at least partially surrounds the structural element; a sensor for detecting interference patterns generated when the single broadband light beam concurrently illuminates a portion of the area and at least a portion of the structural element; and an analyzer for analyzing the interference patterns to determine the height difference between the area and the structural element.
Claims17
A system for determining a height difference between an area of a surface of an object and a structural element, the system comprises:
- a scanner for scanning, by a single broadband light beam, the structural element and the area of the surface of the object, wherein the area at least partially surrounds the structural element;
- a sensor for detecting interference patterns generated when the single broadband light beam concurrently illuminates a portion of the area and at least a portion of the structural element;
- and
- an analyzer for analyzing the interference patterns to determine the height difference between the area and the structural element.
A method for determining a height difference between an area of a surface of an object and a structural element that is surrounded by the area, the method comprises:
- scanning by a single broadband light beam, the structural element and the area;
- detecting interference patterns generated during the scanning, when the single broadband light beam concurrently illuminates a portion of the area and at least part of the structural element;
- detecting non-interference patterns generated when the single broadband light beam illuminates only a portion of the area;
- and
- analyzing the interference patterns to determine the height differences between the area and the structural element.
Dependencies are inferred from the claim text.