System and method to measure nano-scale stress and strain in materials
AssigneeWilliam Marsh Rice University
InventorsAndreas Luttge, Firdaus Udwadia, Kenneth H. Nealson, Steven D. Goodman
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Abstract
A system for measuring stress and strain in a sample is provided. The system includes a sample holder operable to support the sample; a stress inducing assembly operable to apply force to a selected location on the sample to deform the sample by a selected distance in a range from about 0.1 angstrom to about a millimeter; and an interferometer operable to determine a surface topography of the deformed sample at a resolution in a range from about 0.1 angstrom to about a micron.
Claims23
A system for testing a sample, comprising
- a sample holder operable to support the sample;
- a stress inducing assembly operable to apply force to a selected location on the sample to deform the sample by a distance in a range from about 0.1 angstrom to about a millimeter;
- and
- an interferometer operable to determine a surface topography of the deformed sample at a resolution in a range from about 0.1 angstrom to about a micron.
A method of testing a sample, comprising the steps of:
- supporting the sample;
- inducing stress in the sample to deform the sample by a distance in a range from about 0.1 angstrom to about a millimeter;
- and
- determining a surface topography of the deformed sample at a resolution in a range from about 0.1 angstrom to about a micron.
Dependencies are inferred from the claim text.