US 2011/0032505 A1 · Robot For In-Vacuum Use

Abstract

A robot positions a workpiece within a vacuum chamber of a lithographic apparatus. A first component of the robot is located within a vacuum chamber to position a workpiece along a translational axis. A shaft supports the first component such that an axis of symmetry of the shaft is perpendicular to the translational axis, and a second component rotates the shaft about the axis of symmetry and moves the shaft in a direction parallel to the axis of symmetry. The second component includes a gas bearing configured to introduce gas along a circumferential surface of the shaft and a scavenging seal configured to evacuate the gas introduced by the second component gas bearing. The robot substantially reduces, or eliminates the out-gassing of hydrocarbon molecules in a range from about 0 to 200 a.m.u., thus rendering the robot suitable for use in extreme ultra-violet (EUV) photolithography applications.

Claims21

Dependent claims

1-28. (canceled)

A lithographic apparatus, comprising:

an illumination system configured to produce a beam of radiation;
a patterning device located in a vacuum chamber and configured to pattern the beam of radiation;
a projection system configured to project the patterned beam onto a target portion of a substrate within the vacuum chamber;
and
a robot for positioning a workpiece within the vacuum chamber, comprising:
a first component at least partially located within the vacuum chamber and configured to position the workpiece along a translational axis, the workpiece being located within the vacuum chamber;
a shaft configured to support the first component such that an axis of symmetry of the shaft is perpendicular to the translational axis;
and
a second component positioned outside of the vacuum chamber and configured to (i) rotate the shaft about the axis of symmetry and (i) move the shaft in a direction parallel to the axis of symmetry, wherein the second component comprises:
a second component gas bearing configured to introduce gas along a circumferential surface of the shaft;
and
a scavenging seal configured to evacuate the gas introduced by the second component gas bearing.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application

12/936,465Filed 22 Apr 2009

Priority

25 Apr 2008

Published

10 Feb 2011

Term ends

Not estimatedThe source records don’t support an estimate.

Classification7 codes

G03F 7/7075
Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask: handling workpieces outside exposure position,…
G03F 7/70741
Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask: handling masks outside exposure position, e.g.…
H10P 72/0474
Comprising a chamber adapted to a particular process: comprising at least one lithography chamber
H10P 72/3302
Into and out of processing chamber: mechanical parts of transfer devices

Robot For In-Vacuum Use

Life of this patent

Robot For In-Vacuum Use

Life of this patent

Abstract

Claims21