Apparatus and method of application and development

An application and development apparatus configured to deliver a substrate input to a carrier block by a carrier to a process block via a transportation unit for use in the carrier block, form a coating film including a resist film on said substrate at the process block, transport said substrate to an exposure apparatus via an interface block, apply a development process at said process block to said substrate subjected to exposure and returned to said process block via said interface block, and deliver said substrate subjected to development to said carrier block, said application and development apparatus comprising:

• a plurality of blocks stacked on each other, directed to coating film formation,
• wherein each of said plurality of blocks directed to coating film formation comprises a plurality of first processing units including a first solution processing unit to apply a coating solution to said substrate and a first heating unit heating said substrate applied with a coating solution, and a transportation unit for use in a first block for transporting said substrate between the first processing units, at least one of said blocks directed to coating film formation including a solution processing unit for resist solution application,
• said application and development apparatus further comprising a development process block stacked with respect to said blocks directed to coating film formation to constitute a layered block together with said blocks directed to coating film formation,
• wherein said development process block comprises a plurality of second processing units including a second heating unit to heat said substrate subjected to exposure and a second solution processing unit to apply a developer on said substrate, and a transportation unit for use in a second block for transporting said substrate between the second processing units,
• said application and development apparatus further comprising:
• a shelf-type delivery stage group including a plurality of delivery stages between said carrier block and said layered block, each of said plurality of delivery stages arranged for each of said plurality of blocks directed to coating film formation and said development process block to deliver said substrate with respect to said transportation unit for use in the first block or said transportation unit for use in said second block,
• a vertical transportation unit arranged at one of a left side and right side of said delivery stage group when viewed from said carrier block side, ascending and descending between each of said delivery stages at said delivery stage group to deliver said substrate, and
• a substrate inspection unit provided at a side of said delivery stage group opposite to the side where said vertical transportation unit is located, said substrate being input into said substrate inspection unit passing through
• said delivery stage group from said vertical transportation unit.