Image sensor with multilayer interference filters
AssigneeAptina Imaging Corporation
InventorVictor Lenchenkov
Life of this patent
Estimating the term…
Abstract
Image sensors are provided for electronic imaging devices. An image sensor can be formed from an array of image pixels. Bragg-type multilayer interference filters can be formed for the image sensor using dielectric layers with alternating high and low indices of refraction. The multilayer interference filters can be configured to form band-pass filters of desired colors and infrared-blocking filters. Dielectric layers with non-flat bulk absorption properties may be used to tune the absorption of the filters. The interference filters may be provided in a uniform pattern so that an image sensor exhibits a monochrome response or may be arranged in a multicolor color filter array pattern such as a Bayer pattern.
Claims20
An image sensor comprising:
- a substrate;
- photodiodes fabricated in the substrate;
- and
- multilayer interference filters on the photodiodes formed from a plurality of alternating interconnect layers, wherein the interconnect layers include conductive vias and wherein the alternating interconnect layers have alternating high and low indices of refraction.
An array of image pixels formed on a substrate, comprising:
- an array of photodiodes formed in the substrate, wherein each photodiode is associated with a respective one of the image pixels;
- an array of microlenses on the substrate, wherein each microlens is associated with a respective one of the image pixels;
- and
- an array of multilayer interference filters each of which is associated with a respective one of the microlenses.
An image sensor comprising:
- an array of photodiodes fabricated in a substrate;
- an array of microlenses corresponding to the array of photodiodes;
- and
- multilayer interference filters deposited on top of the microlenses that are formed from a plurality of alternating dielectric layers, wherein the alternating dielectric layers have alternating high and low indices of refraction.
Dependencies are inferred from the claim text.