Inkjet print head and method of manufacture therefor
AssigneeToshiba Tec Kabushiki Kaisha
InventorToshio Miyazawa
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AssigneeToshiba Tec Kabushiki Kaisha
InventorToshio Miyazawa
Estimating the term…
According to one embodiment, there is formed a sidewall that isolates pressure chambers and is provided with an oblique angle on its ends in the ink flow direction; an electrode provided on the sidewall and a wiring part are connected; a substrate and an piezoelectric material are adhered together using an adhesive; the piezoel ectric material is processed to form grooves therein; then, a metal film making an electrode and a wiring part is formed on the sidewall and substrate; then, a non-wiring part is formed on the substrate and the piezoelectric material by laser light as a first processing method; subsequently, a non-wiring part is formed on the adhesive portion by a second processing method different from the first method. Thus, widths of the electrode and the wiring connected to an actuator can be uniformized thereby to reduce the variation among voltages applied to the individual actuators.
A method of manufacturing an inkjet printhead which comprises a substrate, actuators varying a volume of a pressure chamber, each actuator composing of a piezoelectric material, being adhered to the substrate and having an oblique angle at their ends in an ink flow direction within the pressure chamber, each actuator forming a sidewall that isolate the respective pressure chambers, an electrode composing of a metal film provided on the sidewall, a wiring part connected to the electrode, and a non-wiring part provided between the adjacent wiring parts, the method comprising:
A method of manufacturing an inkjet printhead which comprises a substrate, actuators varying a volume of a pressure chamber, each actuator composing of a piezoelectric material, each actuator being adhered to the substrate and forming a sidewall that isolate the respective pressure chambers, an electrode composing of a metal film provided on the sidewall, a wiring part connected to the electrode, and a non-wiring part provided between the adjacent wiring parts, the method comprising:
An inkjet printhead, comprising:
Dependencies are inferred from the claim text.