Image forming method and charged particle beam apparatus
AssigneeHitachi High-Technologies Corporation
InventorsAtsushi KOBARU, Hidetoshi Morokuma, Hiroki Kawada, Sho Takami, Katsuhiro Sasada, Kouichi Yamamoto, Norio Satou, Kunio Nakanishi
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Abstract
An image forming method and a charged particle beam apparatus suitable for suppressing the inclination of charging when scanning a two-dimensional area with a charged particle beam. A third scanning line located between a first scanning line and a second scanning line is scanned. After the first, second and third scanning lines have been scanned, a plurality of scanning lines are scanned between the first and third scanning lines and between the second and third scanning lines.
Claims12
An image forming method for scanning a two-dimensional area on a sample with a charged particle beam and forming an image of scanning area, the image forming method comprising the step of:
- charging an area which includes a field of view with the charged particle beam, by scanning a first and second lines, by scanning a third line between the first and second scanning lines, and by scanning a plurality of scanning lines between the first and third scanning lines, between the second and third lines so as to repeat scanning new scanning lines located on center lines between already scanned scanning lines, and
- forming an image by scanning the field of view included in the charged area with the charged particle beam.
A charged particle beam apparatus including a deflector scanning charged particle beam on a sample and a control apparatus for controlling the deflector, wherein:
- the control apparatus controls the defectlor such that
- scanning a first and second lines within a charging area which includes a field of view, scanning a third line between the first and second scanning lines,
- scanning a plurality of scanning lines between the first and third scanning lines, between the second and third lines so as to repeat scanning new lines located on center lines between already scanned scanning lines, and
- forming an image by scanning the field of view with the charged particle beam.
Dependencies are inferred from the claim text.