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US 2011/0032053 A1Published application
Dual input, dual output filtering apparatus using bulk acoustic wave resonator, and resonator used as bulk acoustic wave resonator
AssigneeSamsung Electronics Co., Ltd.
InventorsYun Kwon PARK, In Sang Song, Duck Hwan Kim, Chul Soo Kim, Jea Shik Shin
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Abstract
A Dual Input, Dual Output filtering apparatus using a Bulk Acoustic Wave Resonators (BAWR), and a resonator used as the BAWR may be provided. A Dual Input, Dual Output filtering apparatus may include a plurality of BAWRs connected in series and parallel.
Claims21
A filtering apparatus, comprising:
- a plurality of Bulk Acoustic Wave Resonators (BAWRs) configured to be connected in series and in parallel, two input ends of the plurality of BAWRs, connected in series, being configured for Dual Input, two output ends of the plurality of BAWRs, connected in series, being configured for Dual Output.
A resonator, comprising:
- an air gap formed on a Low Temperature Oxide (LTO) located on silicon, or formed on silicon located on a first metal electrode;
- a support formed on the air gap using a dielectric substance;
- a second metal electrode formed on the support;
- a piezoelectric material formed on the second metal electrode;
- a third metal electrode formed on the piezoelectric material;
- and
- a dielectric substance formed on the third metal electrode.
4 more elements
Dependencies are inferred from the claim text.