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US 2011/0031992 A1Published application
Tester and semiconductor device test apparatus having the same
AssigneeSamsung Electronics Co., Ltd.
InventorsByoungjoo Kim, Inseok Hwang, Jung-Woo Kim
Life of this patent
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Abstract
Provided are a tester and a semiconductor device test apparatus having the tester. The tester includes a tested head configured to transfer electronic signals to a probe card. The tester also includes a leveling unit is provided on the tester head. The leveling unit is configured to apply a load to the probe card to maintain a level state of the probe card.
Claims20
A tester comprising:
- a tester head configured to transfer electric signals to a probe card;
- and
- a leveling unit provided on the tester head, the leveling unit configured to maintain a horizontality of the probe card by applying a load to the probe card.
A tester comprising:
- a leveling unit including a first supporting plate provided above a probe card, a second supporting plate provided below the first supporting plate and above the probe card, and an elastic member provided between the first and the second supporting plates, the leveling unit configured to control the elastic member to apply a load to the probe card to limit bending of the probe card.
A semiconductor device test apparatus comprising:
- a tester head configured to transfer electric signals to a probe card;
- a tester main body configured to input and output the electric signals to the test head;
- a substrate supporting unit, on which semiconductor devices for testing are provided and movable in the vertical direction toward the probe card such that electrode terminals of the semiconductor devices make contact with probes of the probe card;
- and
- a leveling unit provided on the tester head, the leveling unit configured to maintain a horizontality of the probe card by applying a load to the probe card.
2 more elements
Dependencies are inferred from the claim text.