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US 2011/0031566 A1Published application
Conductive nanomembrane, and mems sensor of using the same
AssigneeSnu R&Db Foundation
InventorsYong Hyup Kim, Jung Hoon Lee, Tae June Kang, Eui Yun Jang
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Abstract
The present invention relates to a conductive nanomembrane and a Micro Electro Mechanical System sensor using the same, and more particularly, a conductive nanomembrane that is formed by stacking a polymer electrolyte film and a carbon nanotube layer, and a MEMS sensor using the same.
Claims18
A conductive nanomembrane, comprising:
- a lower polymer electrolyte film;
- and
- a carbon nanotube layer formed on the lower polymer electrolyte film, where a network of carbon nanotubes are formed in the carbon nanotube layer.
A MEMS (micro electro mechanical system (MEMS) sensor, comprising:
- a substrate provided with an opening;
- a conductive nanomembrane formed on the substrate provided with the opening, the conductive nanomembrane including:
- a lower polymer electrolyte film;
- and
- a carbon nanotube layer formed on the lower polymer electrolyte film, where a network of carbon nanotubes are formed in the carbon nanotube layer;
- an upper plate, provided on the conductive nanomembrane, being spaced from the conductive nanomembrane by a spacer;
- a lower plate provided under the substrate;
- and
- an upper electrode, formed under the upper plate, being spaced from an upper surface of the conductive nanomembrane.
6 more elements
Dependencies are inferred from the claim text.