Semiconductor light emitting device and method for manufacturing the same
AssigneeSony Corporation
InventorsNaoki Hirao, Toshihiko Watanabe
Life of this patent
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Abstract
A semiconductor light emitting device includes a light emitting portion, and an electrode formed on the light emitting portion. The electrode includes: a light reflecting layer configured to reflect light emitted from the light emitting portion and including a first metal; a first seed layer formed directly on the light reflecting layer and including a second metal; a second seed layer coating at least side surfaces of the light reflecting layer and the first seed layer, the second seed layer including a third metal; and a plating layer coating at least top and side surfaces of the second seed layer, the plating layer including a fourth metal.
Claims35
A semiconductor light emitting device comprising:
- a light emitting portion;
- and
- an electrode formed on the light emitting portion, the electrode including
- a light reflecting layer configured to reflect light emitted from the light emitting portion and including a first metal,
- a first seed layer formed directly on the light reflecting layer and including a second metal,
- a second seed layer coating at least side surfaces of the light reflecting layer and the first seed layer, the second seed layer including a third metal, and
- a plating layer coating at least top and side surfaces of the second seed layer, the plating layer including a fourth metal.
A semiconductor light emitting device comprising:
- a light emitting portion including
- a first semiconductor layer having a first conductivity type,
- an active layer, and
- a second semiconductor layer having a second conductivity type that is opposite to the first conductivity type;
- and
- an electrode formed on the light emitting portion, the electrode including
- a light reflecting layer comprising Ag and configured to reflect light emitted from the light emitting portion,
- a first seed layer comprising Al and formed on the light reflecting layer,
- a second seed layer comprising Zn and coating at least side surfaces of the light reflecting layer and the first seed layer, and
- a plating layer comprising Ni and coating at least top and side surfaces of the second seed layer.
A method of manufacturing a semiconductor light emitting device comprising:
- forming a light emitting portion;
- and
- forming an electrode on the second semiconductor layer of the light emitting portion by
- forming a light reflecting layer configured to reflect light emitted from the light emitting portion and including a first metal,
- forming a first seed layer on the light reflecting layer, the first seed layer including a second metal,
- forming a second seed layer on at least side surfaces of the light reflecting layer and the first seed layer, the second seed layer including a third metal, and
- forming a plating layer on at least top and side surfaces of the second seed layer, the plating layer including a fourth metal,
- wherein the light reflecting layer and the first seed layer are formed by a lift-off method.
A method of manufacturing a semiconductor light emitting device comprising:
- forming a light emitting portion including
- a first semiconductor layer having a first conductivity type,
- an active layer, and
- a second semiconductor layer having a second conductivity type that is opposite to the first conductivity type;
- and
- forming an electrode on the light emitting portion by
- forming a light reflecting layer comprising Ag and configured to reflect light emitted from the light emitting portion,
- forming a first seed layer comprising Al on the light reflecting layer,
- depositing a second seed layer comprising Zn on at least side surfaces of the light reflecting layer and the first seed layer, and
- forming a plating layer by electroless plating on at least top and side surfaces of the second seed layer, the plating layer comprising Ni,
- wherein the light reflecting layer and the first seed layer are formed by a lift-off method.
Dependencies are inferred from the claim text.