US 2011/0031501 A1 · DISPLAY DEVICE AND MANUFACTURING METHOD OF DISPLAY DEVICE

Abstract

According to one feature of the present invention, a display device is manufactured according to the steps of forming a semiconductor layer; forming a gate insulating layer over the semiconductor layer; forming a gate electrode layer over the gate insulating layer; forming source and drain electrode layers in contact with the semiconductor layer; forming a first electrode layer electrically connected to the source or drain electrode layer; forming an inorganic insulating layer over part of the first electrode layer, the gate electrode layer, the source electrode layer, and the drain electrode layer; subjecting the inorganic insulating layer and the first electrode layer to plasma treatment; forming an electroluminescent layer over the inorganic insulating layer and the first electrode layer which are subjected to plasma treatment; and forming a second electrode layer over the electroluminescent layer.

Claims28

Dependent claims

A light emitting display device comprising:

a thin film transistor formed over a substrate;
an interlayer insulating film over the thin film transistor:
a wiring formed over the interlayer insulating film;
wherein the wiring is electrically connected to the thin film transistor,
a first electrode formed over the wiring;
wherein the first electrode is electrically connected to the wiring,
an inorganic insulating film formed over the first electrode;
wherein the inorganic insulating film has an opening which reaches the first electrode;
a rounded corner formed at the opening of the inorganic insulating film;
an electroluminescent layer over the inorganic insulating film;
and
a second electrode formed over the electroluminescent layer.

9 more elements

Dependencies are inferred from the claim text.

Display device and manufacturing method of display device

Life of this patent

Display device and manufacturing method of display device

Life of this patent

Abstract

Claims28