Resistance variable element and manufacturing method thereof

A method of manufacturing a resistance variable element, comprising the steps of:

• forming a first electrode;
• forming a first oxygen-deficient transition metal oxide layer on the first electrode;
• forming a second oxygen-deficient transition metal oxide layer on the first oxygen-deficient transition metal oxide layer such that the second oxygen-deficient transition metal oxide layer has higher oxygen content than the first oxygen-deficient transition metal oxide layer;
• forming a second electrode layer comprising platinum or platinum alloy on the second oxygen-deficient transition metal oxide layer;
• and
• performing thermal treatment to form hillocks in the second electrode layer at an interface between the second electrode layer and the second oxygen-deficient transition metal oxide layer, after forming the second electrode layer.

A method of manufacturing a resistance variable element, comprising the steps of:

• forming a first electrode;
• forming a first oxygen-deficient transition metal oxide layer on the first electrode;
• forming a second oxygen-deficient transition metal oxide layer on the first oxygen-deficient transition metal oxide layer such that the second oxygen-deficient transition metal oxide layer has higher oxygen content than the first oxygen-deficient transition metal oxide layer;
• forming a second electrode layer comprising palladium or palladium alloy on the second oxygen-deficient transition metal oxide layer;
• and
• performing thermal treatment to form hillocks in the second electrode layer at an interface between the second electrode layer and the second oxygen-deficient transition metal oxide layer, after forming the second electrode layer.