Method for stem sample inspection in a charged particle beam instrument

A method for examination of an excised sample in a charged particle beam instrument, where the sample has a long axis, and where the charged particle beam instrument comprises:

• an ion-beam;
• a specimen stage;
• the specimen stage having at least one tilt axis substantially perpendicular to the axis of the ion beam;
• an electron beam;
• the electron beam having an axis;
• and,
• an X-Y plane;
• a nano-manipulator;
• the nano-manipulator having a probe shaft;
• the probe shaft having an axis;
• the probe shaft further having a probe tip;
• where the method comprises:
• calculating a first angle as a function of:
• a pre-determined second angle that is the angle of tilt of the specimen stage relative to the X-Y plane of the charged particle beam instrument;
• a pre-determined third angle that is the angle between the tilt axis of the specimen stage and the projection onto the X-Y plane of the axis of the probe shaft;
• and,
• a pre-determined fourth angle that is the inclination of the axis of the probe shaft relative to the X-Y plane of the charged particle beam instrument;
• calculating a fifth angle as a function of the first, second, third, and fourth angles, where the fifth angle is the angle between the long axis of the sample and the projection of the axis of the probe shaft onto the X-Y plane;
• rotating the specimen stage to the calculated fifth angle, whereby the projection of the axis of the probe shaft onto the X-Y plane is collinear with the long axis of the sample;
• attaching the sample to the probe tip;
• lifting out the sample with the probe tip;
• and,
• rotating the probe shaft by the calculated first angle, whereby the sample is placed substantially perpendicular to the axis of the electron beam.