Faraday cup array integrated with a readout ic and method for manufacture thereof

A detector array structure comprising:

• a substrate including a plurality of trenches formed therein;
• a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charge particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection;
• a plurality of readout connections connecting to respective ones of the collectors;
• a landing substrate disposed on a side of the substrate opposite openings to the collectors and connected to the plurality of readout connections, said landing substrate including landing pads connecting respective ones of the collectors to the landing pads;
• and
• a plurality of contact pads on the landing substrate connecting the landing pads to external circuitry for collection and processing of said signals indicative of charged particle collection.

A method for making a detector array, comprising:

• forming in a substrate a plurality of trenches across a surface of the substrate;
• forming in the plurality of trenches a plurality of collectors;
• forming a plurality of readout connections on a side of the substrate opposite openings to the collectors, said readout connections configured to collect signals from respective ones of the plurality of collectors indicative of charged particle collection;
• and
• connecting respective ones of the plurality of readout connections to respective ones of the plurality of the collectors.

A system for collecting charged particles, comprising:

• a charged particle source configured to produce the charged particles;
• and
• a detector array configured to collect the charged particles, and including,
• a substrate including a plurality of trenches formed therein,
• a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charge particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection, a plurality of readout connections connecting to respective ones of the collectors;
• and
• a plurality of readout circuits disposed on a side of the substrate opposite openings to the collectors and connected to the plurality of readout connections, said readout circuits configured to read said signals from respective ones of the plurality of collectors indicative of charged particle collection.

A system for collecting charged particles, comprising:

• a charged particle source configured to produce the charged particles;
• and
• a detector array configured to collect the charged particles, and including,
• a substrate including a plurality of trenches formed therein,
• a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charge particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection, a plurality of readout connections connecting to respective ones of the collectors,
• a landing substrate disposed on a side of the substrate opposite openings to the collectors and connected to the plurality of readout connections, said landing substrate including landing pads connecting respective ones of the collectors to the landing pads, and
• a plurality of contact pads on the landing substrate connecting the landing pads to external circuitry for collection and processing of said signals indicative of charged particle collection.

A detector array comprising:

• a substrate including a plurality of trenches formed in the substrate and disposed in sequence across a surface of the substrate;
• a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charged particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection;
• a plurality of readout connections connecting to respective ones of the collectors;
• a plurality of readout circuits disposed on a side of the substrate opposite openings to the collectors and connected to the plurality of readout connections, said readout circuits configured to read said signals from respective ones of the plurality of collectors indicative of charged particle collection;
• and
• an ion source attached to a portion of the substrate removed from the trenches.