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US 2011/0031218 A1Published application
Method for making thermoacoustic device
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsLIANG LIU, ZHUO CHEN, KAI LIU, CHEN FENG, KAI-LI JIANG, SHOU-SHAN FAN
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Abstract
The present invention relates to a method for making a thermoacoustic device. The method includes the following steps. A substrate with a surface is provided. A plurality of microspaces is formed on the surface of the substrate. A sacrifice layer is fabricated to fill the microspaces. A metal film is deposited on the sacrifice layer, and the sacrifice layer is removed. A signal input device is provided to electrically connect with the metal film.
Claims13
A method for making a thermoacoustic device comprising:
- providing a substrate with a surface;
- forming a plurality of microspaces on the surface of the substrate;
- fabricating a sacrifice layer to fill the plurality of microspaces;
- depositing a metal film on the sacrifice layer;
- removing the sacrifice layer.
2 more elements
Dependencies are inferred from the claim text.