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AssigneeApplied Materials, Inc.
InventorsBRYAN LIAO, KATSUMASA KAWASAKI, YASHASWINI PATTAR, SERGIO FUKUDA SHOJI, DUY D. NGUYEN, KARTIK RAMASWAMY, ANKUR AGARWAL, PHILLIP STOUT, SHAHID RAUF
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Methods for processing a substrate are provided herein. In some embodiments, a method of etching a dielectric layer includes generating a plasma by pulsing a first RF source signal having a first duty cycle; applying a second RF bias signal having a second duty cycle to the plasma; applying a third RF bias signal having a third duty cycle to the plasma, wherein the first, second, and third signals are synchronized; adjusting a phase variance between the first RF source signal and at least one of the second or third RF bias signals to control at least one of plasma ion density non-uniformity in the plasma or charge build-up on the dielectric layer; and etching the dielectric layer with the plasma.
A method of etching a dielectric layer on a substrate, comprising:
A method of etching a dielectric layer on a substrate disposed on a substrate support of a capacitively coupled plasma etching reactor having an upper electrode disposed above the substrate and a lower electrode disposed in the substrate support, comprising:
Dependencies are inferred from the claim text.