Particle beam systems and methods

An inspection method comprising:

• focusing a particle beam onto a sample;
• operating at least one detector located close to the sample;
• assigning detection signals generated by the at least one detector to different intensity intervals;
• determining, based on the detection signals assigned to the intensity intervals, at least one first signal component related to electrons incident on the detector;
• and
• determining, based on the detection signals assigned to the intensity intervals, at least one second signal component related to X-rays incident on the detector.

A particle beam system comprising:

• a particle beam source configured to generate a primary particle beam;
• an objective lens configured to focus the primary particle beam in an object plane;
• a detection system arranged between the objective lens and the object plane, the detection system comprising at least one detector;
• and
• a computer configured to analyze output signals of the at least one detector and to output a first value representing an electron intensity and a second value representing an elemental composition.

A method of manufacture of a miniaturized object, the method comprising:

• focusing a particle beam onto a region of an object;
• operating at least one detector located close to the object;
• determining, based on detection signals received from the at least one detector, an amount of electrons emanating from the object due to the particle beam;
• determining, based on detection signals received from the at least one detector, an amount of X-rays emanating from the object due to the particle beam;
• and
• removing material from the object based on the determined amounts of electrons and X-rays.