US 2011/0031183 A1 · Multi-Layer Three-Dimensional Structures Having Features Smaller Than a Minimum Feature Size Associated With the Formation of Individual Layers

Abstract

Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation method used in forming the structures. In some embodiments, multi-layer structures include a first element (e.g. first patterned layer with a gap) and a second element (e.g. second patterned layer with a gap) positioned adjacent the first element to define a third element (e.g. a net gap or opening resulting from the combined gaps of the first and second elements) where the first and second elements have features that are sized at least as large as the minimum feature size and the third element, at least in part, has dimensions or defines dimensions smaller than the minimum feature size.

Claims19

Dependent claims

A layered three-dimensional structure having a minimum feature size associated with the formation of each layer, the layered three-dimensional structure comprising:

a first element, comprising at least one first material region and at least one first void in the first material region;
and
a second element, comprising at least one second material region and at least one second void in the second material region and which at least one second material region is positioned adjacent to and adhered to any overlapping portions of the at least one first material region, to define a third element comprising the at least one first void and the at least one second void,
wherein the third element has one or more individual openings sized less than the minimum feature size,
wherein the first element comprises a structure formed from multiple layers,
wherein the second element comprises a structure formed from multiple layers,
wherein individual layers of the at least one first material region of the first element are adhered to overlapping portions of adjacent individual layers of the at least one first material region. and
wherein individual layers of the at least one second material region of the second element are adhered to overlapping portions adjacent individual layer of the layer one second material region.

5 more elements

Dependencies are inferred from the claim text.

Multi-Layer Three-Dimensional Structures Having Features Smaller Than a Minimum Feature Size Associated With the Formation of Individual Layers

Life of this patent

Multi-Layer Three-Dimensional Structures Having Features Smaller Than a Minimum Feature Size Associated With the Formation of Individual Layers

Life of this patent

Abstract

Claims19