Method and apparatus for biochemical sensor array with integrated charge based readout circuitry
OwnerSelim Eminoglu, Haluk Külahinventors
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Abstract
A MEMS biochemical sensor configured to sense a target molecule, such as a DNA molecule, a protein molecule, and a viruses molecule. In one embodiment, the biochemical sensor may include a cell and a readout module. The cell is configured to be coupled to a probe molecule, to retain a pre-sensing charge before the probe molecule is exposed to the target molecule, and to retain a sensing charge after the probe molecule is exposed to the target molecule. The readout module is coupled to the cell and configured to generate a measurement signal based on the pre-sensing charge and the sensing charge.
Claims20
A MEMS biochemical sensor configured to sense a target molecule, the biochemical sensor comprising:
- a cell configured to be coupled to a probe molecule, the cell configured to retain a pre-sensing charge before the probe molecule is exposed to the target molecule and to retain a sensing charge after the probe molecule is exposed to the target molecule;
- and
- a readout module coupled to the cell and configured to generate a measurement signal based on the pre-sensing charge and the sensing charge.
A MEMS biochemical sensing system configured to sense a plurality of target molecules, the biochemical sensing system comprising:
- a plurality of cells, each of the plurality of cells configured to be coupled to one of a plurality of probe molecules, each of the plurality of cells configured to retain a pre-sensing charge before the plurality of probe molecules are exposed to the plurality of target molecules, and configured to retain a sensing charge after the plurality of probe molecules are exposed to the plurality of target molecules;
- and
- a readout module selectively coupled to the plurality of cells and configured to generate a plurality of measurement signals, each of the plurality of measurement signals based on the pre-sensing charge and the sensing charge of one of the plurality of cells.
A method for sensing a biochemical molecule, comprising the steps of:
- coupling a probe molecule to a MEMS biochemical sensor;
- pre-charging the probe molecule to a bias voltage level;
- exposing the probe molecule to the biochemical molecule;
- and
- detecting, using the MEMS biochemical sensor, a target charge of the biochemical molecule.
Dependencies are inferred from the claim text.