Magnetron sputtering target assembly and coating apparatus having same
AssigneeHon Hai Precision Industry Co., Ltd.
InventorSHAO-KAI PEI
Life of this patent
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Abstract
A coating apparatus includes a shielding casing defining a chamber, a substrate holder received in the chamber and a target assembly located inside the shielding casing. The substrate holder is configured to hold a substrate. The target assembly faces the substrate. The target assembly includes a target frame, two opposite target electrodes, a number of magnetrons and a transport unit. The target base includes two opposite end surfaces and a number of side surfaces interconnecting the end surfaces. The two opposite target electrodes are fixed on the two opposite side surfaces. The magnetrons are received in the receiving cavity and disposed between the target electrodes. The transport unit is configured to carry the magnetrons to circulate therearound.
Claims18
A coating apparatus comprising:
- a shielding casing defining a chamber therein;
- a holder received in the chamber and configured to hold a substrate;
- and
- a target assembly located inside the shielding casing and facing the substrate holder, the target assembly comprising:
- a target frame comprising two opposite end surfaces and a plurality of side surfaces interconnecting the end surfaces, the end surfaces and the side surfaces cooperatively defining a receiving cavity therein;
- two opposite target electrodes received in the receiving cavity and fixed on the side surfaces of the target base;
- a plurality of magnetrons received in the receiving cavity and disposed between the target electrodes;
- and
- a transport unit configured to carry the magnetrons to circulate therearound.
A magnetron sputtering target assembly comprising:
- a target frame comprising two opposite end surfaces and a plurality of side surfaces interconnecting the end surfaces, the end surfaces and the side surfaces cooperatively defining a receiving cavity therein;
- two opposite target electrodes received in the receiving cavity and fixed on the side surfaces of the target base;
- a plurality of magnetrons received in the receiving cavity and disposed between the target electrodes;
- and
- a transport unit configured to carry the magnetrons to circulate therearound.
Dependencies are inferred from the claim text.