Buffered storage and transport device for tool utilization
AssigneeMuratec Automation Co., Ltd.
InventorsJOSEPH JOHN FATULA, JR., ROUMEN ILIEV DEYANOV, KEVIN TZOU, PABLO GONZALEZ, ROBERT CARLSON, JOHN BROOKS GREENE
Life of this patent
Estimating the term…
Abstract
A transport mechanism is configured to transport a work piece carrier within a buffer in fabrication facility, comprising: a transporter configured to travel on two rails, wherein the transporter comprises (i) a flat belt hoist mechanism configured to lift and to lower one or more work piece carriers, and (ii) a gripper mechanism configured to capture and to release the one or more work piece carriers.
Claims8
A transport mechanism configured to transport a work piece carrier within a buffer in a fabrication facility, comprising:
- a transporter configured to travel on two rails, wherein the transporter comprises (i) a hoist mechanism configured to lift and to lower the work piece carrier, and (ii) a gripper mechanism configured to capture and to release the work piece carrier;
- a work piece container configured to store one or more work pieces;
- an enclosed frame comprising:
- one or more storage shelves configured to hold the work piece container and configured for work piece container exchange with an overhead transport vehicle;
- one or more frame rails mounted (i) above at least one of the one or more storage shelves, and (ii) at a base above a load port on which the transporter is configured to travel;
- and
- an elevator configured to move the transporter between a first level and a second level of the buffer;
- a carriage with one or more carriage rails configured to support the transporter;
- an alignment device configured to align the one or more carriage rails with at least one of the one or more frame rails;
- a frame support configured to elevate the enclosed frame above one or more load ports of a process tool in the fabrication facility;
- and
- a control mechanism configured to:
- direct the transporter to move between one of the one or more storage shelves and a load port location;
- direct the elevator to move between the first level and the second level of the buffer;
- synchronize movement of two or more of the elevator, the transporter, and the work piece container;
- and
- exchange commands with a work piece container movement system that is configured to manage movement of the work piece container within the fabrication facility.
Dependencies are inferred from the claim text.