Photoelectric conversion device and manufacturing method thereof
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei YAMAZAKI, Yasuyuki ARAI, Satohiro OKAMOTO
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AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsShunpei YAMAZAKI, Yasuyuki ARAI, Satohiro OKAMOTO
Estimating the term…
To provide a photoelectric conversion device whose characteristics are sufficiently improved. The photoelectric conversion device includes: a first electrode; a unit cell having a semiconductor layer exhibiting a first conductivity type, a semiconductor layer having an effect of photoelectric conversion, and a semiconductor layer exhibiting a second conductivity type; and a second electrode. In the semiconductor layer having an effect of photoelectric conversion, crystal grains each grain diameter of which is smaller than a thickness of the semiconductor layer having an effect of photoelectric conversion are aligned in the thickness direction of the semiconductor layer having an effect of photoelectric conversion from the semiconductor layer exhibiting the first conductivity type to the semiconductor layer exhibiting the second conductivity type.
A photoelectric conversion device, comprising:
A photoelectric conversion device, comprising:
A method for manufacturing a photoelectric conversion device, comprising the steps of:
A method for manufacturing a photoelectric conversion device, comprising the steps of:
Dependencies are inferred from the claim text.