Wet coating system having annealing chamber
AssigneeHon Hai Precision Industry Co., Ltd.
InventorsCHIEN-HAO HUANG, SHAO-KAI PEI
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Abstract
An exemplary wet coating system includes a coating chamber, an annealing chamber, an unloading chamber, and a mechanical arm. The coating chamber is configured for allowing a substrate being wet coated therein. The unloading chamber is configured for allowing the substrate being unloaded therein. The annealing chamber is interposed between and communicated with the coating chamber and the unloading chamber and is configured for allowing the substrate being annealed therein. The communicated coating chamber, annealing chamber, and unloading chamber are vacuumized. The mechanical arm is configured for holding the substrate and moving the substrate across the coating chamber, the annealing chamber, and the unloading chamber.
Claims20
A wet coating system comprising:
- a coating chamber configured for coating a substrate therein using a wet coating process;
- an unloading chamber configured for allowing the substrate being unloaded therein;
- an annealing chamber interposed between and communicating with the coating chamber and the unloading chamber and configured for allowing the substrate being annealed therein, the communicated coating chamber, annealing chamber, and unloading chamber being vacuumized;
- and
- a mechanical arm configured for holding the substrate and moving the substrate across the coating chamber, the annealing chamber, and the unloading chamber.
Dependencies are inferred from the claim text.