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US 2011/0030475 A1Published application
Sensor element and method for operating a sensor element
AssigneeRobert Bosch GmbH
InventorsHeiko Stahl, Axel Grosse
Life of this patent
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Abstract
A sensor element, in particular a multichannel acceleration sensor having a substrate and a seismic mass, the sensor element having a detecting element for detecting a deflection of the seismic mass relative to the substrate, and the sensor element having an excitation element for exciting a deflection of the seismic mass perpendicular to the main extension plane.
Claims12
A sensor element comprising:
- a substrate;
- a seismic mass;
- a detecting element for detecting a deflection of the seismic mass relative to the substrate;
- and
- an excitation element for exciting a deflection of the seismic mass perpendicular to a main extension plane.
2 more elements
A method for operating a sensor element comprising:
- deflecting a seismic mass from an initial position to a sensor position via an excitation element;
- and
- detecting a deflection of the seismic mass from the sensor position on the basis of acceleration forces, with the aid of a first detecting element.
Dependencies are inferred from the claim text.