Inertial Sensors with Reduced Sensitivity to Quadrature Errors and Micromachining Inaccuracies

A MEMS gyroscope comprising:

• a first resonator configured for sensing rotation about a first axis (e.g., x axis) in a device plane, the first resonator including a first pair of shuttles suspended by a first plurality of suspension flexures and interconnected by a first fork, the first plurality of suspension flexures configured to allow the first pair of shuttles to be rotationally dithered in the device plane and to tilt out-of-plane about respective tilt axes (e.g., axes y1 and y2) perpendicular to the first axis;
• a second resonator configured for sensing rotation about a second axis (e.g., y axis) normal to the first axis in the device plane, the second resonator including a second pair of shuttles suspended by a second plurality of suspension flexures and interconnected by a second fork, the second plurality of suspension flexures configured to allow the second pair of shuttles to be rotationally dithered in the device plane and to tilt out-of-plane about a tilt axis perpendicular to the second axis (e.g., axis x2);
• a first set of Coriolis sensing electrodes underlying the first pair of shuttles and positioned along an axis (e.g., axis x1) parallel to the first axis to sense tilting of the first pair of shuttles about their respective tilt axes (e.g., axes y1 and y2);
• and
• a second set of Coriolis sensing electrodes underlying the second pair of shuttles and positioned along the first resonator tilt axes (e.g., axes y1 and y2) to sense tilting of the second pair of shuttles about their tilt axis (e.g., axis x2).