Mems mass-spring-damper systems using an out-of-plane suspension scheme
AssigneeKing Abdullah University of Science ang Technology
InventorsAhmed Kamal Said Abdel Aziz, Abdel Hameed Sharaf, Mohamed Yousef Serry, Sherif Salah Sedky
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Abstract
MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.
Claims33
A MEMS gyroscope, comprising:
- a. a shared proof mass;
- b. one or more anchors;
- c. one or more movable combs;
- and
- d. a plurality of suspensions;
- e. wherein said plurality of suspensions are out-of-plane with said shared proof mass.
A MEMS accelerometer, comprising:
- a. a proof mass;
- b. one or more anchors;
- and
- c. a plurality of suspensions;
- d. wherein said plurality of suspensions are out-of-plane with said proof mass.
A quad-mass MEMS gyroscope, comprising:
- a. a plurality of proof masses;
- b. one or more anchors;
- c. one or more movable combs;
- and
- d. a plurality of suspensions;
- e. wherein said suspensions are out-of-plane with said proof masses.
A MEMS mass-spring-damper system, comprising:
- a. at least one proof mass;
- and
- b. a plurality of suspensions;
- c. wherein said suspensions are out-of-plane with said at least one proof mass.
A method for fabricating a vertical suspension in a substrate in a MEMS mass-spring-damper system, said method comprising the steps of:
- a. realizing a first side and a second side of said vertical suspension by selectively etching through a top surface of said substrate;
- and
- b. realizing a third side and a fourth side of said vertical suspension by selectively etching through a bottom surface of said substrate.
Dependencies are inferred from the claim text.