Mems actuators with stress releasing design
AssigneeReseaux MEMS, societe en commandite
InventorsStéphane Ménard, Nicolas Gonon
Life of this patent
Estimating the term…
Abstract
The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.
Claims24
A micro-electromechanical (MEMS) actuator comprising:
- a hot arm member;
- a cold arm member;
- wherein the cold arm member comprises at least two longitudinally spaced-apart flexors.
A micro-electromechanical (MEMS) switch comprising:
- a first cantilever MEMS actuator comprising a first hot arm member, a first cold arm member and a first dielectric tether attaching together a free end of the first hot arm member and a free end of the first cold arm member;
- a second cantilever MEMS actuator comprising a second hot arm member, a second cold arm member and a second dielectric tether attaching together a free end of the second hot arm member and a free end of the second cold arm member;
- and
- at least two longitudinally spaced-apart flexors positioned on the cold arm member of at least one among the first and the second MEMS actuator.
A micro-electromechanical (MEMS) actuator mounted on a substrate, the MEMS comprising:
- a hot arm member;
- a cold arm member;
- wherein at least one among the hot arm member and the cold arm member comprises at least one spring section.
A micro-electromechanical (MEMS) switch comprising:
- a first cantilever MEMS actuator attached to a substrate and comprising a first hot arm member, a first cold arm member and a first dielectric tether attached to a free end of the first hot arm member and a free end of the first cold arm member;
- a second cantilever MEMS actuator attached to the substrate and comprising a second hot arm member, a second cold arm member and a second dielectric tether attached to a free end of the second hot arm member and a free end of the second cold arm member;
- and
- at least one spring section positioned on at least one among the hot arm member and the cold arm member of at least one of the MEMS actuators.
Dependencies are inferred from the claim text.