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US 2011/0012703 A1Published application
Mems actuators and switches
AssigneeReseaux MEMS, societe en commandite
InventorsStéphane Ménard, Jun Lu, Nicolas Gonon, Normand Lassonde
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Abstract
Micro-electromechanical systems (MEMS) actuators and switches exhibiting geometries and configurations providing superior operating characteristics and longer lifetimes.
Claims26
A Microelectromechanical (MEMS) actuator comprising:
- a hot arm member;
- and
- a cold arm member;
- CHARACTERIZED IN THAT:
- the hot arm member exhibits an asymmetric length.
2 more elements
A MEMS actuator comprising:
- a hot arm member;
- and
- a cold arm member having an asymmetric width.
A MEMS switch comprising:
- a substrate;
- a first actuator anchored to the substrate;
- and
- a second actuator anchored to the substrate;
- wherein one of the actuators is an asymmetric actuator and mechanically contacts one another upon the application of an actuating voltage.
2 more elements
A Microelectromechanical (MEMS) actuator disposed upon a substrate, said actuator comprising:
- a hot arm member having an end anchored to the substrate and a movable free end;
- and
- a cold arm member;
- CHARACTERIZED IN THAT:
- the hot arm member exhibits an asymmetric width.
2 more elements
A method of operating a Microelectromechanical (MEMS) switch, said switch comprising:
- a substrate;
- a first actuator disposed upon the substrate, said first actuator having an anchored end and a free end including a latch;
- a second actuator disposed upon the substrate, said second actuator having an anchored end and a free end including a latch;
- wherein each of said first and second actuators are normally in an undeflected position and may be independently moved to a respective deflected position upon the application of a respective actuating voltage;
- wherein the movements of the actuators are substantially perpendicular to one another over an actuating distance;
- the method of operating the MEMS switch comprising the steps of:
- actuating one of the actuators such that its free end including the latch is deflected towards the free end of the other actuator;
- actuating the other actuator such that its free end including the latch is deflected towards the free end of the other actuator;
- and
- deactuating one of the deflected actuators such that the latches engage one another.
7 more elements
Dependencies are inferred from the claim text.