Magnetron assembly
AssigneeApplied Materials, Inc.
InventorsNeal W. Matuska, Joel T. Anderson, Clifford L. Taylor, John R. German
Life of this patent
Estimating the term…
Abstract
A rotating magnetron assembly having a structure to reduce bearing degradation by substantially preventing the flow of current through the bearing using non-conductive materials or providing a low resistance current flow path or by allowing current to flow through the bearing in a way which prevents arcing between the various bearing components.
Claims21
A magnetron assembly comprising:
- a housing;
- a rotatable drive shaft mounted for rotation within said housing;
- a target connected with said drive shaft;
- a bearing between said housing and said drive shaft wherein at least a portion of said bearing is constructed of an electrically conductive material;
- and
- means for substantially preventing any electrical current flow through said bearing.
A magnetron assembly comprising:
- a housing;
- a rotatable drive shaft mounted for rotation within said housing;
- a target connected with said drive shaft;
- a bearing between said housing and said drive shaft wherein said bearing includes an inner race, an outer race and a bearing member between said inner race and said outer race and wherein said bearing is packed with a conductive grease.
A combination bearing/seal for a magnetron assembly of the type comprising a housing, a rotatable drive shaft mounted within said housing, a cathode connected with the drive shaft and the combination bearing/seal positioned between said housing and said drive shaft, said combination bearing/seal comprising:
- an outer bearing housing connectable with the magnetron assembly housing;
- an inner bearing housing connectable to the magnetron assembly drive shaft for rotation therewith;
- a ferro fluidic seal between said outer bearing housing and said inner bearing housing;
- a bearing member positioned between said outer bearing housing and said inner bearing housing;
- and
- means for substantially preventing any electrical current flow through said bearing member.
A magnetron assembly comprising:
- a housing;
- a drive shaft for rotation within said housing;
- a target connected with said drive shaft;
- a bearing between said housing and said drive shaft wherein said bearing includes an inner race, an outer race and a bearing member between said inner race and said outer race and wherein at least one of said inner race, said outer race and said bearing member is constructed of an electrically non-conductive material and at least one of said inner race, said outer race and said bearing member is constructed on an electrically conductive material.
Dependencies are inferred from the claim text.