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US 2011/0001421 A1Published application
Matrix-type cold-cathode electron source device
AssigneePanasonic Corporation
InventorsMakoto Yamamoto, Keisuke Koga
Life of this patent
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Abstract
A matrix-type cold-cathode electron source device includes a mesh structure (8) on which through-holes (9) are formed and drive portions (7a, 7b). The through-hole (9) has an opening diameter of 1/N or less of the alignment pitch of electron source elements (4) and the drive portions (7a, 7b) drive the mesh structure (8) every 1/N of the alignment pitch of the electron source elements (4). Thus it is possible to increase a resolution without reducing the size of an electron source.
Claims14
A matrix-type cold-cathode electron source device comprising:
- a cold-cathode electron source array in which cold-cathode electron source elements with multiple emitters for emitting electrons are arranged in a matrix with a first pitch;
- a mesh structure opposed to the cold-cathode electron source array and having through-holes arranged with the first pitch;
- a target opposed to the cold-cathode electron source array via the mesh structure and set at a position colliding with electron beams having been emitted from the cold-cathode electron source array and passed through the through-holes of the mesh structure;
- and
- drive portions that drive the mesh structure in a first alignment direction and a second alignment direction of the through-hole.
2 more elements
Dependencies are inferred from the claim text.