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US 2010/0327327 A1Published application
Photosensitive charge-coupled device comprising vertical electrodes
AssigneeSTMicroelectronics (Crolles 2) SAS
InventorFrançois Roy
Life of this patent
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Abstract
A charge transfer device formed in a semiconductor substrate and including an array of electrodes forming rows and columns, wherein: the electrodes extend, in rows, in successive grooves with insulated walls, disposed in the substrate thickness and parallel to the charge transfer direction.
Claims10
A charge transfer device formed in a semiconductor substrate and comprising an array of electrodes forming rows and columns, said rows corresponding to a charge transfer direction, wherein:
- the electrodes exclusively extend in successive grooves with insulated walls disposed in the substrate thickness and parallel to the charge transfer direction, and
- charge accumulation and transfer regions extend, in a volume delimited by neighbouring electrodes of a same column, in an N-type layer having a thickness substantially equal to the depth of the electrodes.
Dependencies are inferred from the claim text.