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US 2010/0310993 A1Published application
Transporting method, transporting apparatus, exposure method, and exposure apparatus
AssigneeNikon Corporation
InventorMaiko YAMAGUCHI
Life of this patent
Estimating the term…
Abstract
A ladder type stage apparatus that transports a film-shaped substrate includes a plurality of rods whose longitudinal directions are aligned in a direction that is orthogonal to the moving direction of the film-shaped substrate in order to support the film-shaped substrate; chains that join the rods along a closed-loop trajectory; and a drive motor that moves the rods along this loop-shaped trajectory via the chains.
Claims24
A transporting method for transporting a film-shaped member, comprising:
- moving the film-shaped member in a moving direction along a surface of the film-shaped member;
- supporting a plurality of surface locations of the film-shaped member by a plurality of rod-shaped members whose longitudinal direction is aligned in a direction which intersects the moving direction, and which are lined up in the moving direction;
- and
- moving the plurality of rod-shaped members that are supporting the film-shaped member in synchronization in the moving direction.
1 more element
A transporting apparatus that transports a film-shaped member, comprising:
- a plurality of rod-shaped members whose longitudinal direction is aligned in a direction which intersects a moving direction along a surface of the film-shaped member, and that line up in the moving direction in order to support the film-shaped member;
- and
- a drive apparatus that moves a plurality of the rod-shaped members that are supporting the film-shaped member from among the plurality of the rod-shaped members in synchronization in the moving direction.
Dependencies are inferred from the claim text.