Positioning device, lithographic apparatus using same, and device manufacturing method

A positioning device for causing a table to be driven in the driving area of a base on which the table is mounted, the positioning device comprising:

• a motor connected to a drive circuit that drives the table;
• a electric current source that outputs a predetermined electric current in order to impart a thrust force, which is directed toward the center of the driving area, to the table;
• and
• a braking control unit configured to switch connection of the motor from the drive circuit to a braking circuit including the electric current source based on a stopping signal, when the table is positioned at a braking area located at the peripheral edge part of the driving area.

A control method for controlling a motor that drives a table in a driving area on a base, the control method comprising:

• a step of measuring the position of the table;
• a first output step of outputting a electric current for controlling the position of the table based on the measured position;
• a second output step of outputting electric current for imparting a thrust force, which is directed toward the center of the driving area, to the table;
• a step of receiving a stopping signal for stopping the table;
• and
• a step of switching from a state in which the motor is controlled depending on the output of the first output step to a state in which the motor is controlled depending on the output of the second output step, based on the received stopping signal.

A control method in which a driving source connected to a drive circuit causes a table mounted on a base to be driven in the driving area of the base, the control method comprising the steps of:

• receiving a stopping signal for stopping the table;
• detecting that the table is reached to a braking area positioned at the peripheral edge part of the driving area;
• switching the driving source from the drive circuit to a braking circuit including a electric current source which imparts a thrust force, which is directed toward the center of the driving area, to the table on the basis of the reception of the stopping signal and the detection;
• and
• switching the driving source to a short circuit short-circuiting both ends of the driving source so as to activate a dynamic brake, when the table is reached to a driving area inside the braking area with the aid of the thrust force imparted from the electric current source.

A lithographic apparatus that transfers a pattern onto a substrate, comprising:

• a table that is movable with a pattern-formed original or the substrate mounted,
• a base;
• a motor that drives the table in the driving area on the base;
• a position sensor that detects the position of the table;
• and
• a control unit that controls the motor,
• wherein the control unit comprises:
• a first output unit that outputs electric current for controlling the position of the table based on the output of the position sensor;
• a second output unit that outputs electric current for imparting a thrust force, which is directed toward the center of the driving area, to the table;
• and
• a switch unit that switches from a state in which the motor is controlled depending on the output of the first output unit to a state in which the motor is controlled depending on the output of the second output unit, based on a stopping signal for stopping the table.