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US 2010/0304524 A1Published application
Manufacturing methods of thin film solar cell and thin film solar cell module
AssigneeKisco
InventorsSeung-Yeop Myong, Boung-Kwon Lim
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Abstract
A manufacturing method of a thin film solar cell comprises performing dry cleaning of an insulation substrate on which a transparent electrode is formed, patterning the transparent electrodes to be spaced apart from each other, performing dry cleaning of the patterned transparent electrodes, forming a semiconductor layer on surfaces of the transparent electrodes and patterning a metal electrode on the semiconductor layer.
Claims16
A manufacturing method of a thin film solar cell comprising the steps of:
- performing dry cleaning of an insulation substrate on which a transparent electrode is formed;
- patterning the transparent electrodes to be spaced apart from each other;
- performing dry cleaning of the patterned transparent electrodes;
- forming a semiconductor layer on surfaces of the transparent electrodes;
- and
- patterning a metal electrode 26 on the semiconductor layer.
3 more elements
A manufacturing method of a thin film solar cell module comprising the steps of:
- performing dry cleaning of an insulation transparent substrate on which a transparent electrode is formed;
- patterning the transparent electrodes to be spaced apart from each other;
- performing dry cleaning of the patterned transparent electrodes;
- forming a semiconductor layer on surfaces of the transparent electrodes;
- patterning a metal electrode on the semiconductor layer;
- performing an edge exclusion of removing the transparent electrodes, the semiconductor layer, and the metal electrode on edge regions of the insulation substrate to a predetermined width;
- and
- performing a dry cleaning procedure after the edge exclusion step.
5 more elements
Dependencies are inferred from the claim text.