Mems device and fabrication method of the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsHee-moon Jeong, Jin-woo Cho, Yong-hwa Park, Jun-o Kim, Seok-mo Chang
Life of this patent
Estimating the term…
Abstract
A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.
Claims11
A method of fabricating a microelectromechanical systems (MEMS) device, the method comprising:
- bonding a second substrate to a first substrate;
- forming a frame and an actuator connected to the frame to be capable of performing a relative motion with respect to the frame by partially removing the first substrate;
- and
- forming at least one stopper which restricts a displacement of the actuator in a direction along the height of the actuator by partially removing the second substrate.
Dependencies are inferred from the claim text.