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US 2010/0304306 A1Published application
Flexible micro/nanofluidic devices
AssigneeIkerlan Centro De Investigaciones
InventorsFco. Javier Blanco Barro, María Aguirregabiria Izaguirre, Aitor Ezkerra Fernández, Janette Lillia Schulze, Jesús Miguel Ruano López, Mayora Oria
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Abstract
The present invention relates to a method for manufacturing micro/nanofluidic devices that incorporate overhanging micromechanical and metal components monolithically integrated with the fluidic circuitry.
Claims16
A method for manufacturing micro/nanofluidic devices comprising:
- a) depositing a thermosetting polymeric photoresin on two substrates of polymeric material covering the surface of two independent substrates (wafer 1) and (wafer 1′).
- b) photolithographing at low temperature the layers of thermosetting polymeric photoresin deposited in step a)
- c) depositing the metal type components in at least one wafer
- d) microstructuring the metal components deposited in step c)
- e) depositing a layer of thermosetting polymeric photoresin on wafer 1′
- f) photolithographing and developing at low temperature the thermosetting polymeric photoresin deposited on wafer 1′
- g) sealing at low temperature the wafers 1 and 1′ obtained by means of superimposing them with the surfaces of the photoresin facing one another
- h) releasing the micro/nanofluidic structures from the substrates of biocompatible polymeric material
- i) cutting the devices.
6 more elements
Dependencies are inferred from the claim text.